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Parts List for Axcelis - Eaton 8200P and 8250 Systems

A small picture following the Signet part number is a link to the Part Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	Picture	DWG		Signet Part #	Part Description	KIT		PDS
4400746					01-1037	10-32 X 3/8 SHC Center Vented
3500027					02-0214	O-Ring, Buna
3500028					02-0364	O-Ring, Buna
6973-0006-8112					03-10150	10-32 X 1 1/2 SHC
4400001					03-1037	10-32 X 3/8 SHC
4400007					03-1W00	#10 Washer, Flat
4400041					03-1WS0	#10 Washer, Split
6973-0002-6202					03-6025	6-32 X 1/4 SHC
4400061					03-6062	6-32 X 5/8 SHC
5053-0031-0001					03-6N00S	Hex Nut 6-32, Ag Plated
4400232					03-6W00	Washer #6, Flat
4400034					03-6WS0	Washer #6, Split
4400042					03-8750	8-32 X 1/2 BH
4400122					03-8W00	#8 Washer, Flat
7230-0003-0014					37-6002	Standoff, 3/8D X 3/4L, 6-32
5000024					37-6007	Standoff, 1/2D X 5/8L, 8-32
5000132					37-6042	Standoff, 3/8D X 3/8 L,6-32
7230-0003-0020					37-6045	Standoff, 1/2D X 3/4 L, 6-32
7230-0003-0007					37-6046	Standoff, 1/2 D X 1 L, 6-32
1708680 Ref.					40-0868	Repeller Insulator Spacer
17133400 Ref.					40-3340	A/C for a Box liner			PDS
17133400 Ref.					40-33401-42	Moly Box Liner, ELS Dual Vaporizer			PDS
17133400 Ref.					40-3340-42	Moly Box Liner, ELS Gas Only			PDS
17033150 Ref.					40-3341	Gas Inlet Nipple, Graphite			PDS
17036670 Ref.					40-3667	A/C Rear Plate, Gas only, NV20A
17156990 Ref.					40-5699	Cathode Wire Assembly			PDS
N\A					40-6000A	Main Body, Rev. A
17278160 Ref.					40-7816	A/C, Moly, Gas only, ELS, 8250
1790420 Ref.					40-9042-2	Repeller Cup Shield, Ta
4300031					44-0031	Retaining Rod Clip
8462-0051-0001					44-0051	Washer
4000059					44-0059	Retaining Rod Spring
1704990					44-0499	Arc Chamber Side Plate
1706380					44-0638	Nozzle Retainer, 5ppm
17107630					44-0763	Flag Faraday
1708680					44-0868	Insulating Bushing, A/C
6950-0017-0002					44-1702	Screw, Retaining A/C
17121740					44-1740	Repeller
17121760A					44-1760	Set Screw, Moly
17119620					44-1962	Repeller, W
172821001					44-2100	Screw, Retaining A/C
17121750					44-2175	Inner Cup Shield
17121770					44-2177	Repeller Screw, Moly
17121850					44-2185	Repeller Insulator
17121930					44-2193	Cathode Nut - Moly, ELS
17192211					44-2211	Filament Support, ELS/VAE
17142890B					44-2890	Slotted Cathode
17131610					44-3161	Defining Beam Aperture			PDS
17133270					44-3270	Cathode Insulator, ELS/VAE
17032830					44-3283	Insulating Bushing
17033150					44-3315	Bushing, Socket Joint - Source			PDS
17033160					44-3316	Ball Joint			PDS
17033170					44-3317	Filament Strap
17133300					44-3330	Filament Feed Strap
17335310					44-3531	Filament Clamp Eterna ELS
17036440					44-3644	Retaining Rod, Tantalum
17036670					44-3667	Gas Plenum-A/C Rear Plate
17043870					44-4387	Filament Clamp
17246790					44-4679	Cathode Sub Assembly, ELS 2X
17048870					44-4887	Arc Chamber Front Plate
17246800					44-6800	Filament for the ELS source
17170060					44-7006	Electrode Spacer			PDS
7631-0001-0002					44-7631	Ion Gauge Tube, 3/4" Kovar TT			PDS
17277260					44-7726	Top Plate
17278140					44-7814	Insulator, Repeller
17278160					44-7816	A/C, Moly, ELS, 8250
17287850					44-7850	Filament, ELS .040
17287860					44-8786	Graphite Cathode Support
17287870					44-8787	Cathode Insulator Block
17189120					44-8912	Filament ELS with Flats
17189140					44-8914	Nut Plate, Moly ELS-IAS
17189160					44-8916	Filament Support
1789810					44-8981	Arc Chamber End Plate
1789820					44-8982	Filament Shield
1789840					44-8984	Repeller Mounting Screw			PDS
1789850					44-8985	Filament
1789870					44-8987	Arc Chamber Mount
1200321					44-8993	Filament Mounting Screw
1790420					44-9042	Repeller Shield
17192210					44-9221	Filament Support - ELS/VAE
17097340					44-9734	Feed Strap, Filament


	Copyrights Signet Products, Corp. 2017

Last update January 27, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com