Spare Parts List - Signet Products Inc.


	"Quality and Value through Engineering"

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Parts by OEM
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    - 6200
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    - 6200 All
    - 8200
    - 8250
    - GSD LED ELS
    - NV10
    - NV20
    - ULTRA
    - Ion Gauge Tube
  - Applied Mat'l.
  - Nissin
    - Med Current
  - ULVAC
    - IW630 Med Pwr
- PVD
  - Novellus
    - 3180
    - 3190
    - 3280
    - 3290
    - Ion Gauge Tube
- MBE
  - Veeco
    - GEN 2000
    - GEN III
  - Riber
    - R49
    - R6000
  - Riber/VG
    - V90
    - V100
    - V150
  - MBE Sales
- MOCVD
  - Aixtron
  - Veeco/Emcore
    - D125
    - D180
    - E300
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    - K465
    - K475
  - MOCVD Sales
- Vacuum Prod.
  - Agilent Varian
    - Ion Gauge Tube
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- Plasma Etch
  - Lam Research
    - All Lam Research
    - 9500
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    - All VSEA
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    - 350D/DE CF/DF3000
    - E220 E500 E1000
    - 120/160/180 XP
    - ViiSion®
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  - Axcelis
  - Applied Mat'l.
    - All Applied
    - 9000
    - XR
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160

The following Parts are available from Signet Products for the

VSEA - Applied Materials VIISion Implanter Tool

Click on the part picture to go to another page with a larger image and more information about the part..

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This page is in OEM Part Nbr Sequence, use the up arrows before the Signet/OEM Part Nbrs to re-sort the list.

	Oem Part Nbr	Part Description	Part Image		Signet Part Nbr	DWG	KIT	PDS
		Repeller Kit			1087		KIT	PDS
	2865086	Ceramic Standoff			37-5086
	E17026590	Defining Aperture			37-2659			PDS
	E17041850	Filament, Plasma Flood Gun- VIISion			37-1850
	E17060540	Reflector			37-6054
	E17063170	End Plate, Repeller, W			37-3170
	E17063190	Bottom Plate, Dual Vap., Tungsten			37-6319
	E17063220	Feed Tube, Dual Vaporizer			37-6322
	E17067001	Side Plate, VIISion, W			37-6700
	E17069340	Filament, VIISion			37-9340			PDS
	E17077190	Shield, Gauss			37-7190			PDS
	E17085510	Shield, Rear Housing			37-5510			PDS
	E17086860	Source Insulator, BN			37-8686
	E17089262	Suppressor Electrode /AC			37-9262			PDS
	E17089751	Aperture, Defining /AC			37-9751			PDS
	E17091850	Insulator, 60KV			37-9185
	E17092400 Ref.	Filament Post Assembly			30-9240			PDS
	E17093240	Silver Strap, Right (VIISion)			37-3240
	E17094401	Tantalum Gas Tube			37-94401			PDS
	E17094401 Ref.	Tantalum Gas Tube			30-94401			PDS
	E17094421	Base, Plate, VIISion, W			37-4421			PDS
	E17094421 Ref.	Base Plate .060 Liner, W			30-4421			PDS
	E17094441	Side Plate, W			37-94441			PDS
	E17094441 Ref.	Gas line & Side Plate Assembly			1105		KIT	PDS
	E17094550	Retainer, Magnet			37-4550			PDS
	E17121431	Left Filament Spring			37-1431
	E17131210	Source Fil. Insulator			37-3121
	E17132270	End Plate, W			30-4440			PDS
	E17135630	Plate, Face, Flat Source - W			37-3563
	E17145410	Repeller, Bernas A/C			37-4541
	E37000094	Gauge, UHV, Nude, 2 W filaments			30-0094			PDS

	Notes:
	A "DWG" Following the Signet Part Nbr indicates a link to a Drawing of the Part or Assembly.
	A "KIT" Following the Signet Part Nbr indicates it's a Kit and is a link to the Kit Parts List Page
	A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.
	A *"Ref."* following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.


	Copyrights Signet Products, Corp. 2017

Last update February 8, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com