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Parts List for Applied Materials 9500 Series Systems
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A small picture following the Signet part number is a link to the Part Picture page. |
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. |
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page |
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format. |
Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design. |
The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list. |
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OEM PN |
Picture |
DWG |
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Signet Part # |
Part Description |
KIT |
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PDS |
0020-20114 | | | | 72-0114 | Insulator, DC Bias | | | 0020-80037 | | | | 72-80037 | Pre Defining Aperture | | PDS | 0020-80071 Ref. | | | | 70-0071 | Anticathode, Moly | | | 0020-80627 | | | | 72-80627 | PFS Arc Chamber | | PDS | 0020-80632 | | | | 72-80632 | Side Guide Tube Shield 1 | | PDS | 0020-80633 | | | | 72-80633 | Side Guide Tube Shield 2 | | PDS | 0020-80634 | | | | 72-80634 | Top Guide Tube Shield | | PDS | 0020-80635 | | | | 72-80635 | Bottom Guide Tube Shield | | PDS | 0020-80637 | | | | 72-80637 | EPG3 Aperture | | PDS | 0020-80638 | | | | 72-80638 | EPG2 Aperture | | PDS | 0020-81224 | | | | 72-81224 | Arc Chamber | | PDS | 0020-82135 | | | | 72-82135 | Filament, Bernas | | | 0020-82163 | | | | 72-82163 | Nozzle - Antimony | | PDS | 0020-82164 | | | | 72-82164 | Liner Base, Tungsten w/ gas inlet hole | | | 0020-83425 | | | | 72-83425 | Ground Electrode | | PDS | 0020-83425 Ref. | | | | 70-83425 | Ground Electrode, Large Dual Slot Impreg | | PDS | 0020-83974 | | | | 72-83974 | Mounting Suppression Electrode | | PDS | 0020-84219 | | | | 72-84219 | Front Plate, Half, Graphite | | PDS | 0020-84522 | | | | 72-84522 | Mounting, Ground Electrode | | PDS | 0020-84523 | | | | 72-84523 | Electrode Suppresion | | PDS | 0020-84523 Ref. | | | | 70-84523 | Suppression Elect, Lgr. Dual Slot Impreg | | PDS | 0020-85074 | | | | 72-85074 | Sleeve, Blank, Arc Chamber - Graphite | | | 0020-87698 | | | | 72-87698 | Plate Cover | | PDS | 0020-87885 | | | | 72-87885 | Post MRS Slit | | PDS | 0020-92710 Ref. | | | | 70-92710 | Enhanced Faraday Cup | | PDS | 0020-93489 Ref. | | | | 70-3489 | Tung. Wire Coil .290" ID 1.7"L | | | 0020-95104 | | | | 72-95104 | Beam Stop | | PDS | 0020-98420 | | | | 72-98420 | Aperture Plate | | PDS | 0020-98649 | | | | 72-98649 | Pre MRS Slit | | PDS | 0020-98696 | | | | 72-98696 | Pre Defining Aperture Holder | | PDS | 0020-98807 | | | | 72-98807 | Shield Graphite | | PDS | 0020-98837 | | | | 72-98878 | Inner Insert | | PDS | 0020-98877 | | | | 72-98877 | Outer Insert | | PDS | 0020-98879 | | | | 72-98879 | Neutral Insert | | PDS | 0020-98960 Ref. | | | | 70-98960 | Liner, End with Pin | | | 3310-0104 | | | | 72-0104 | Ion Gauge Tube | | PDS |
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