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Parts List for Aixtron 2600 Systems

A small picture following the Signet part number is a link to the Part Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	Picture	DWG		Signet Part #	Part Description	KIT		PDS
					52-0120-1	Mo Insert (for use with part # 52-0120)
					53-0470	Particle Trap Housing
					53-0111	2600G3 Quartz Thrust Piece
					53-0110	2600G3 Quartz Ceiling Plate
					52-0150	InP Wafer (100mm)
					52-0140	GaAs Wafer(100mm)
					52-0120	2600G3 Exh Coll Ring w Opt Mon Enhanced
					52-0102	2600G3 O-Ring
					52-0100-1	Mo Insert (for use with 52-0100)
					52-0100	2600G3 Exhaust Collector Ring, Enhanced			PDS
					9007	Ceran Upper Ring Kit	KIT
40070246					53-0150	2600G3 Exhaust Collector Ring (All Moly)
40020236					9006	2600G3 Ceran Lower Ring Kit	KIT
40020378					53-0860	2600G3 Ceiling Plate (Quartz) w/SN
40020436					53-0820	2600G3 Diffusion barrier (Quartz)
40020445					53-0840	2600G3 Sleeve (Quartz)
40020457					53-0570	2600G3 Segment (Quartz)
40020512					53-0750	2600G3 Nozzle injector (Quartz)
40020586					53-0760	2600G3 Supporting Tube (Quartz)
40020600					53-0600	2600G3 Ceran Lower Ring Segment #1
40020601					53-0601	2600G3 Ceran Lower Ring Segment #2 w/h
40020602					53-0602	2600G3 Ceran Lower Ring Segment #3
40020603					53-0603	2600G3 Ceran Lower Ring Segment #4 w/h
40020642					53-0740	2600G3 Nozzle Holder (Quartz)
40020643					53-0730	2600G3 Nozzle Holder (Quartz)
40020686					53-0880	2600G3 Rot-monitoring (Quartz)
40020690					53-0720	2600G3 Ceiling Plate (Quartz)
40020691					53-0780	2600G3 Segment (Quartz)
40020692					53-0810	2600G3 Sleeve (Quartz)
40020693					53-0790	2600G3 Banana (Quartz)
40020694					53-0850	2600G3 Ceiling Plate (Quartz)
40020713					53-0830	2600G3 Ceiling Plate (Quartz)
40020766					53-0770	2600G3 Base Plate Holder (Quartz)
40020798					53-0870	2600G3 Ceiling Plate (Quartz) 11mm slot
40020807					53-0590	2600G3 Nozzle Holder (Quartz)
40020900					53-0510	2600G3 Nozzle (Quartz)
40020908					53-0700	2600G3 Tension Disk (Quartz)
40020911					53-0530	2600G3 Diffusion Barrier (Quartz)
40020912					53-0690	2600G3 Supporting Segment (Quartz)
40020913					53-0680	2600G3 Supporting Segment (Quartz)
40020918					53-0520	2600G3 Ceiling Plate (Quartz)
40020919					53-0550	2600G3 Supporting Tube (Quartz)
40020920					53-0540	2600G3 Supporting Disk (Quartz)
40020962					53-0670	Segment (Quartz)
40020963					53-0660	2600G3 Segment (Quartz)
40020964					53-0650	2600G3 Segment (Quartz)
40020965					53-0640	2600G3 Segment (Quartz)
40021039					53-0560	2600G3 Pull Down Pad (Quartz)
40021050					53-0710	2600G3 Ceiling Plate (Quartz)
40021059					53-0580	2600G3 Sleeve (Quartz)
40021081					53-0630	2600G3 Supporting Disk (Quartz)
40060030					53-0300	Glovebox Gauntlets - 300MM
40070140					53-0103	2600G3 Exhaust Ring with Optical Monitor
40070203					53-0190	2600G3 Exhaust Collector Ring
41020236					53-0108	Ceran Upper Ring Segment


	Copyrights Signet Products, Corp. 2017

Last update January 27, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com