Signet Arc Chamber Parts and Assemblies


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1234567890123	Signet Arc Chambers

	We provide many improved Signet designed Arc Chambers which give better performance or lower operating cost and often both. We also provide direct replacements for many OEM Arc Chambers at competitive prices.




	This photo is of a Signet 7000 Arc Chamber Assembly used in VSEA E220 and E500 Implanters. We can provide complete assemblies as well as any of the parts.

A List of Arc Chamber Parts and Assemblies

A "PIC" following a Signet part number indicates a link to our picture page.

A "PDS" for a part indicates a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

Sort Sequence - Use the up arrows before the OEM Part Number and Singet Part Number to re-sort the list.

OEM		OEM PN	PIC		Signet Part #	Part Description	PDS
					1042	One Piece Bernas Arc Chamber Kit
					1042-1	One Piece Bernas Arc Chamber Kit	PDS
					1042-2	One Piece Bernas Arc Chamber Kit
					1042-5	One Piece Bernas Arc Chamber Kit
VSEA AMAT	17014690				30-3692	Arc Chamber Top Plate
VSEA AMAT	F4714001 Ref.				30-4714	Arc Chamber, w/o Solid Source Inlet
VSEA AMAT	F5392001 Ref.				30-5000	Arc Chamber	PDS
VSEA AMAT	H5108001 Ref.				30-5108	Arc Chamber Body, Plugged
VSEA AMAT	F5392001 Ref.				30-5392	Arc Chamber, w/o Solid Source Inlet
VSEA AMAT	07140001 Ref.				30-7140	Arc Chamber Support Plate, Dual	PDS
VSEA AMAT	F9739001 Ref.				30-9739	Arc Chamber, Plugged
VSEA AMAT	E17014670				37-1467	Arc Chamber End Plate
VSEA AMAT	E17014690				37-1469	Arc Chamber Top Plate, Mo
VSEA AMAT	E17014710				37-1471	Arc Chamber Side Plate
VSEA AMAT	E17014720				37-1472	Arc Chamber End Plate Shield
VSEA AMAT	101480001				37-1480	Arc Chamber Front Plate
VSEA AMAT	E17124440				37-2444	End Plate, Arc Chamber - W
VSEA AMAT	E17112662				37-2662	Arc Chamber Top Plate - W - VIISta
VSEA AMAT	F4714001		PIC		37-4714	Arc Chamber
VSEA AMAT	H5105001				37-5105	Arc Chamber Front Plate
VSEA AMAT	H5108001				37-5108	Arc Chamber Body
VSEA AMAT	F5392001				37-5392	Arc Chamber
VSEA AMAT	E17061750				37-6175	Cover, Arc Chamber, Bernas
VSEA AMAT	07140001				37-7140	Arc Chamber Support Plate
VSEA AMAT	E17077001				37-7700	Hook, Arc Chamber
VSEA AMAT	09351001		PIC		37-9351	Arc Chamber End Cap
VSEA AMAT	F9739001				37-9739	Arc Chamber
VSEA AMAT	F9740001				37-9740	Arc Chamber End Cap
VSEA AMAT	F9743001				37-9743	Arc Chamber Support Plate
Axcelis	0843-0007-2001 Ref.				40-0843	Arc Chamber End Cap
Axcelis	1717481 Ref.				40-1748S	Arc Chamber Front Plate Shim
Axcelis	17386180 Ref.				40-6181	Arc Chamber Enhanced moly
					40-6187	Arc Chamber Enhanced, W	PDS
Axcelis	170008960 Ref.				40-8960	Arc chamber Mount
Axcelis	1704990		PIC		44-0499	Arc Chamber Side Plate
Axcelis	1705000				44-0500	Arc Chamber Rear Plate
Axcelis	1705030				44-0503	Arc Chamber Mount
Axcelis	1706440				44-0644	Arc Chamber End Plate Shield
Axcelis	0843-0007-2001				44-0843	Arc Chamber End Cap
Axcelis	1708670				44-0867	Arc Chamber End Plate
Axcelis	0896-0005-4001				44-0896	Arc Chamber
Axcelis	0897-0034-0001				44-08974	Arc Chamber, HT
Axcelis	0897-0041-0003				44-089741	Arc Chamber, Mo, ELS, 8250
Axcelis	0897-0034-0002				44-08974X	Arc Chamber, HT, Dual Feed
Axcelis	1717480				44-1748	Arc Chamber Front Plate
Axcelis	1127580				44-2758	Arc Chamber, Complete Assembly
Axcelis	17127590				44-2759	Arc Chamber, Moly
Axcelis	17133310				44-3331	Arc Chamber W ELS/VAE
Axcelis	17133400				44-3340	Arc Chamber Moly ELS/VAE
Axcelis	17S3432				44-3432	Arc Chamber Front Slit
Axcelis	4710-0070-0001				44-4710	Mount, Arc Chamber
Axcelis	17048870		PIC		44-4887	Arc Chamber Front Plate
Axcelis	E170008950				44-8950	Arc Chamber Mount
Axcelis	0897-0033-0001				44-8973	Arc Chamber, SKM
Axcelis	0897-0033-0002				44-8973X	Arc Chamber, SKM, Dual Feed
Axcelis	1789810		PIC		44-8981	Arc Chamber End Plate
Axcelis	1789870		PIC		44-8987	Arc Chamber Mount
Axcelis	17359610				44-9610	Arc Chamber W ELS/VAE
Axcelis	17B4701				44-B4701	Arc Chamber Rear Plate
Axcelis	17D8880				44-D8880	Arc Chamber, W, LED III
Applied Matl.	0020-94930				72-4930	Arc Chamber Front Plate
Applied Matl.	0020-80627				72-80627	PFS Arc Chamber	PDS
Applied Matl.	0020-81224				72-81224	Arc Chamber	PDS
Applied Matl.	0020-85074				72-85074	Sleeve, Blank, Arc Chamber - Graphite
Applied Matl.	0020-94940				72-94940	Arc Chamber, Graphite - CFO	PDS
VSEA AMAT	4244600 Ref.				75-42446	Arc Chamber, Modified	PDS
					75-45318	Arc Chamber, Modified	PDS
VSEA AMAT	45318-00				76-45318	Arc Chamber
Ulvac					82-0100	Arc Chamber, Moly
Ulvac			PIC		83-0100	Monolithic Signet Enhanced Arc Chamber

A "Ref." following an OEM part number indicates a Signet improved design replacement part related to the referenced OEM part.


	Copyrights Signet Products, Corp. 2017

Last update March 28, 2012


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com