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Parts List for Axcelis - Eaton/Nova NV20A Systems
 
A small picture following the Signet part number is a link to the Part Picture page. 
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. 
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.
The initial list is in OEM part number Sequence, use the up arrows up arrow image before the Signet
Part Number or OEM Part Number to re-sort the list.
up arrow OEM PN Picture DWG u arrow Signet Part # Part Description KIT PDS
110044044-044020KV Feedthrough
120032144-8993Filament Mounting Screw
1200321 Ref.40-8993Filament Mounting Screw
1703283044-3283Insulating Bushing
1703315044-3315Bushing, Socket Joint - SourcePDS
1703316044-3316Ball JointPDS
1703317044-3317Filament Strap
1703644044-3644Retaining Rod, Tantalum
1703667044-3667Gas Plenum-A/C Rear Plate
17036670 Ref.40-3667A/C Rear Plate, Gas only, NV20A
1704387044-4387Filament Clamp
1704887044-4887Arc Chamber Front Plate
170499044-0499Arc Chamber Side Plate
170638044-0638Nozzle Retainer, 5ppm
17072941 Ref.40-8984Repeller Stud 10-32 x 1 3/32
170868044-0868Insulating Bushing, A/C
1708680 Ref.40-0868Repeller Insulator Spacer
170946044-0946Spacer, S/SPDS
1709734044-9734Feed Strap, Filament
176910044-6910Bias PlatePDS
178981044-8981Arc Chamber End Plate
178982044-8982Filament Shield
178983044-8983Repeller Plate
178984044-8984Repeller Mounting ScrewPDS
178985044-8985Filament
178987044-8987Arc Chamber Mount
179042044-9042Repeller Shield
1790420 Ref.40-9042-2Repeller Cup Shield, Ta
400005944-0059Retaining Rod Spring
430003144-0031Retaining Rod Clip
500002437-6007Standoff, 1/2D X 5/8L, 8-32
500013237-6042Standoff, 3/8D X 3/8 L,6-32
     
 
Copyrights Signet Products, Corp. 2017
  
 
 
Last update January 27, 2016
  
 
     
 
Signet Products, Corporation
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
Phone: (650) 592-3575
e-mail: rdavies@signetproducts.com