Spare Parts List - Signet Products Inc.


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Parts List for all Axcelis / Eaton GSD Equipment Systems

A small picture following the Signet part number is a link to the Part Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	Picture	DWG		Signet Part #	Part Description	KIT		PDS
17033150					44-3315	Bushing, Socket Joint - Source			PDS
17033160					44-3316	Ball Joint			PDS
17036440					44-3644	Retaining Rod, Tantalum
17043870					44-4387	Filament Clamp
17061991					44-1991	Aperture Quad Exit w/AC			PDS
17066871					44-6871	Plate Strike Injector Faraday w/AC			PDS
1708680					44-0868	Insulating Bushing, A/C
17089711					44-8971	Electrode .5 VG			PDS
17097240					44-7240	Insulator
17097320					44-9732	Spacer
17097340					44-9734	Feed Strap, Filament
17098511					44-9851	Source Housing Exit Aperture /AC			PDS
17099201					44-9201	Plate Strike, Resolver			PDS
17099631					44-9631	Inner Beam Dump w/AC			PDS
17099661					44-9661	Outer Beam Dump /AC			PDS
17099671					44-9671	Outer End w/AC			PDS
17099831					44-9831	Shield Faraday Cup w/AC			PDS
17100461					44-0461	Cup Shield w/AC			PDS
17100521					44-0521	Exit Dump w/AC			PDS
17101230					44-0123	Filament Shield
17111780					44-1780	Outer Dump w/AC			PDS
17111800					44-1180	Outer Duct w/AC			PDS
17111810					44-1181	Inner Duct w/AC			PDS
17111860					44-1186	Flange Tube w/AC			PDS
17113190					44-1319	Aperture 70 degree Magnet w/AC			PDS
17115410					44-1541	Aperture Faraday Support, Linac w/AC			PDS
17115930					44-5930	Plate Aperture, Linac VG			PDS
17121740					44-1740	Repeller
17121750					44-2175	Inner Cup Shield
17121760A					44-1760	Set Screw, Moly
17121770					44-2177	Repeller Screw, Moly
17121850					44-2185	Repeller Insulator
17121900					44-2190	Cathode Support Insulator
17121930					44-2193	Cathode Nut - Moly, ELS
17123410					44-3410	Insulator Short
17123420					44-3420	Insulator, Long			PDS
17123430 Ref.					40-3430	Retainer, Alumina
17124410					44-2441	Spacer Retaining Rod
17125561					44-5561	Extraction Electrode, Manipulator			PDS
17125571					44-5571	Ground Electrode, Manipulator			PDS
17127590					44-2759	Arc Chamber, Moly
17127600					44-2760	Repeller, Moly
17127610					44-2761	Shield, Insulator
17127650					44-2765	Filament Shield
17128110					44-2811	Arc Slit, 15R Moly
17128230					44-8230	Spacer, Shoulder Screw
1712930 Ref.					40-2193	Cathode Shield, Graphite
17129700					44-2970	Strike Plate #1			PDS
17129710					44-2971	Strike Plate #2			PDS
17129720					44-2972	Strike Plate #3			PDS
17129730					44-2973	Strike Plate #4			PDS
17131610					44-3161	Defining Beam Aperture			PDS
17132290					44-3229	Ground Electrode Insert			PDS
17133270					44-3270	Cathode Insulator, ELS/VAE
17133300					44-3330	Filament Feed Strap
17133310					44-3331	Arc Chamber W ELS/VAE
17133340					44-3334	Cathode Repeller
17133400					44-3340	Arc Chamber Moly ELS/VAE
17133400 Ref.					40-3340	A/C for a Box liner			PDS
17135440					44-3544	Electron Shower Liner /AC
17142890B					44-2890	Slotted Cathode
17156990 Ref.					40-5699	Cathode Wire Assembly			PDS
17158000					44-5800	Cathode,Two piece Moly/Tungsten
17161640					44-1640	Beam Line Bellows, GSD
17170020					44-7002	Extraction Electrode /AC			PDS
17170030					44-0030	Ground Electrode /AC			PDS
17170040					44-7004	Extraction Electrode Insert			PDS
17170060					44-7006	Electrode Spacer			PDS
17170070					44-7007	Electrode Shield
17170600					44-0600	Repeller, W
17170610					44-0610	Repeller Stud, W
17174410 Ref.					40-7441	Insulator, GSD ELS - Alumina			PDS
17189120					44-8912	Filament ELS with Flats
17189150					44-8915	Cathode Plate, Source			PDS
17230100					44-3010	Arc Slit, T15 Mo
17254850					44-5485	Filament, ELS
17287850					44-7850	Filament, ELS .040
17287860					44-8786	Graphite Cathode Support
17287870					44-8787	Cathode Insulator Block
17287880					44-8788	Filament Clamp, ELS			PDS
17287880 Ref.					40-8788	Enhanced ELS Fil. Clamp w/Ta screw			PDS
1766531					44-6531	Plate Burn - Thru			PDS
1789800 Ref.					40-8980-1	Filament Clamp, Enhanced			PDS
1789850					44-8985	Filament
4001166					44-1166	Spring, Compression
4001167					44-1167	Spring, Compression
4300031					44-0031	Retaining Rod Clip
5001608 & 7230-0003-0014					37-6002	Standoff, 3/8D X 3/4L, 6-32
N/A					4028	Filament Replacement Kit	KIT
N/A					40-3340-42	Moly Box Liner, ELS Gas Only			PDS


	Copyrights Signet Products, Corp. 2017

Last update January 27, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com