Spare Parts List - Signet Products Inc.


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Parts List for Axcelis NV10-80 & NV10-16 Systems

A small picture following the Signet part number is a link to the Part Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	Picture	DWG		Signet Part #	Part Description	KIT		PDS
1100440					44-0440	20KV Feedthrough
1127580					44-2758	Arc Chamber, Complete Assembly
1200080					44-0080	Retaining Rod
1200320					44-0032	Filament Mounting Screw
1200321					44-8993	Filament Mounting Screw
1200321 Ref.					40-8993	Filament Mounting Screw
1700310					44-7003	Filament Clamp
17032830					44-3283	Insulating Bushing
17033170					44-3317	Filament Strap
17036440					44-3644	Retaining Rod, Tantalum
17036670					44-3667	Gas Plenum-A/C Rear Plate
17036670 Ref.					40-3667	A/C Rear Plate, Gas only, NV20A
17037680					44-3768	Extraction Electrode			PDS
17037720					44-3772	High Voltage Aperture			PDS
17043870					44-4387	Filament Clamp
17048870					44-4887	Arc Chamber Front Plate
1704940					44-0494	Curved Field Block			PDS
1704990					44-0499	Arc Chamber Side Plate
1704990 Ref.					74-0499	Side Plate, W
1705000					44-0500	Arc Chamber Rear Plate
1705001					40-0500	A/C Rear Plate w/o Solid Source Inlet
1705030					44-0503	Arc Chamber Mount
17062340					44-2340	Replacement High Energy Electrode			PDS
17062350 Ref.					40-2350	Extraction Electrode Plate Modified			PDS
1706370					44-0637	Nozzle
1706380					44-0638	Nozzle Retainer, 5ppm
1706440					44-0644	Arc Chamber End Plate Shield
17072941 Ref.					40-8984	Repeller Stud 10-32 x 1 3/32
1707760					44-0776	Filament .090" dia x 5" Long
1708670					44-0867	Arc Chamber End Plate
1708680					44-0868	Insulating Bushing, A/C
1708680 Ref.					40-0868	Repeller Insulator Spacer
1709460					44-0946	Spacer, S/S			PDS
17100430 Ref.					40-8983	Repeller Assembly, Mo
17119610					74-9610	Filament Mounting Screw - W
1712070					44-1207	Single Gas Electrode			PDS
17123410					44-3410	Insulator Short
17123420					44-3420	Insulator, Long			PDS
17123430 Ref.					40-3430	Retainer, Alumina
1713040					44-1304	Source Shield Tab			PDS
1715240					44-1524	Extension
1717480					44-1748	Arc Chamber Front Plate
1717950					44-1795	Beam Aperture			PDS
1718600					44-1860	Source Cooling Tube
1740090					44-4009	Beam Defining Plate			PDS
1740120					44-4012	Liner Shield, Graphite			PDS
1740290					44-4029	Gas feed tube
1740291					40-4029	Gas Feed Tube, Enhanced
1744550					44-4455	Beam Plate			PDS
1769100					44-6910	Bias Plate			PDS
1789800					44-8980	Filament Clamp
1789800 Ref.					40-8980-1	Filament Clamp, Enhanced			PDS
1789810					44-8981	Arc Chamber End Plate
1789820					44-8982	Filament Shield
1789830					44-8983	Repeller Plate
1789840					44-8984	Repeller Mounting Screw			PDS
1789850					44-8985	Filament
1789870					44-8987	Arc Chamber Mount
1789880					44-8988	Electric Strap
1789890					44-8989	Electric Strap
1790420					44-9042	Repeller Shield
1790420 Ref.					40-9042-2	Repeller Cup Shield, Ta
1795560					44-9556	A/C Top Plate
17S3432					44-3432	Arc Chamber Front Slit
1900400					44-0040	Electron Shower Filament
3300002					44-3302	Ion Gauge Tube, 3/4" Glass			PDS
3300002 Ref.					44-3302S	Ion Gauge Tube Vacuum Sealed			PDS
3300008					37-2518	TC Vacuum Gauge Tube
3300044					44-0044	TC Gauge Tube
3500026					02-0110	O-Ring, Buna
3500027					02-0214	O-Ring, Buna
3500028					02-0364	O-Ring, Buna
3500067					02-0136	O-Ring, Buna
3500076					02-0010	O-Ring, Buna
4000059					44-0059	Retaining Rod Spring
4300031					44-0031	Retaining Rod Clip
4400001					03-1037	10-32 X 3/8 SHC
4400003					03-1025	10-32 X 1/4 SHC
4400007					03-1W00	#10 Washer, Flat
4400041					03-1WS0	#10 Washer, Split
4400042					03-8750	8-32 X 1/2 BH
4400103					03-6637	6-32 X 3/8 CPS
5000024					37-6007	Standoff, 1/2D X 5/8L, 8-32
5000132					37-6042	Standoff, 3/8D X 3/8 L,6-32
5000132 Ref.					30-6042	Standoff, C/B 3/8D X 3/8L, 6-32			PDS
N/A					40-0001	Replacement Low Energy Electrode			PDS
N/A					40-0751	Ion Gauge Tube Adaptor, 3/4" to 1"			PDS
Ref. 1717481					40-1748S	Arc Chamber Front Plate Shim


	Copyrights Signet Products, Corp. 2017

Last update January 27, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com