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Parts List for Axcelis Ultra Series Equipment Systems
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A small picture following the Signet part number is a link to the Part Picture page. |
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. |
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page |
| A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format. |
Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design. |
The initial list is in OEM part number Sequence, use the up arrows  before the Signet
Part Number or OEM Part Number to re-sort the list. |
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OEM PN |
Picture |
DWG |
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Signet Part # |
Part Description |
KIT |
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PDS |
| 17121740 | | | | 44-1740 | Repeller | | | | 17287860 | | | | 44-8786 | Graphite Cathode Support | | | | 17287870 | | | | 44-8787 | Cathode Insulator Block | | | | 17335000 | | | | 44-5000 | Suppression Electrode 1 | | | | 17335010 | | | | 44-5010 | Ground Electrode 1 | | | | 17335020 | | | | 44-5020 | Suppression Electrode 2 | | | | 17335030 | | | | 44-5030 | Ground Electrode 2 | | | | 17355270 | | | | 44-5527 | Cathode, W, one piece | | | | 17355280 | | | | 44-5528 | Arc Slit, Moly | | | | 17355290 | | | | 44-5529 | Cathode Repeller | | | | 17357050 | | | | 44-5705 | Spacer, Eterna | | | | 17384080 | | | | 44-4080 | Nut Plate, Moly | | | | 17E4902 | | | | 44-E4902 | Insulator | | | | 17E7305 Ref. | | | | 44-E7305 | Ceramic standoff (Unglazed) | | | | 5000132 |  | | | 37-6042 | Standoff, 3/8D X 3/8 L,6-32 | | |
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