Spare Parts List - Signet Products Inc.


	"Quality and Value through Engineering"

MOBILE View
Parts by OEM
- Plasma Etch
  - Lam Research
- Implanter
  - VSEA-AMAT
  - Axcelis
    - 6200
    - 6200A
    - 6200 All
    - 8200
    - 8250
    - GSD LED ELS
    - NV10
    - NV20
    - ULTRA
    - Ion Gauge Tube
  - Applied Mat'l.
  - Nissin
    - Med Current
  - ULVAC
    - IW630 Med Pwr
- PVD
  - Novellus
    - 3180
    - 3190
    - 3280
    - 3290
    - Ion Gauge Tube
- MBE
  - Veeco
    - GEN 2000
    - GEN III
  - Riber
    - R49
    - R6000
  - Riber/VG
    - V90
    - V100
    - V150
  - MBE Sales
- MOCVD
  - Aixtron
  - Veeco/Emcore
    - D125
    - D180
    - E300
    - E400
    - E450
    - K465
    - K475
  - MOCVD Sales
- Vacuum Prod.
  - Agilent Varian
    - Ion Gauge Tube
Part Search
Signet Products
- What's New
  - Source Bushings
  - Emcore MOCVD
    - D125
    - D180
    - E400
    - E300
    - E450
    - K465
    - K475
  - Waveguide Liner VSEA Implanters
  - Ion Gauge Tubes
    - Glass IG Tubes
    - Nude IG Tubes
- Contact Signet
- Sales Reps
  - Europe Reps
  - Pac Rim Reps
- Sales Terms
Signet Designs
Data Sheets
- Plasma Etch
  - Lam Research
    - All Lam Research
    - 9500
- Implanters
  - VSEA
    - All VSEA
    - A2F
    - 350D/DE CF/DF3000
    - E220 E500 E1000
    - 120/160/180 XP
    - ViiSion®
    - Genus
    - Vista®
  - Axcelis
  - Applied Mat'l.
    - All Applied
    - 9000
    - XR
- MBE
  - All MBE
  - Veeco/Emcore
  - Riber
  - Riber VG
- MOCVD
- Signet Designs
- PDS Introduction
Signet Home

1234567

Parts List for Aixtron 2000 Systems

A small picture following the Signet part number is a link to the Part Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	Picture	DWG		Signet Part #	Part Description	KIT		PDS
40060030					53-0300	Glovebox Gauntlets - 300MM
40020183					53-2080	2000HT Nozzle Holder (Quartz)
40020184					53-2070	2000HT Nozzle (Quartz)
40020273					53-2090	2000HT Exhaust Tube (Quartz)
40020395					53-2020	2000HT Supporting Tube (Quartz)
40020395					53-2050	Sleeve (Quartz)
40020584					53-3000	2000HT Ceiling Plate (Quartz)
40020616					53-2000	2000HT Supporting Tube (Quartz)
40020617					53-2060	2000HT Pull Down Pad (Quartz)
40020618					53-2030	2000HT Supporting Disk (Quartz)
40020714					53-2010	2000HT Supporting Tube (Quartz)
40020763					53-1180	2000G3 HT Tension Disk (Quartz)
40020826					53-1190	2000HT Tension Disk (Quartz)
40020827					53-2040	2000HT Supporting Disk (Quartz)
41070005					53-0460	2000 Series Exhaust Ring, (Mo seg)
41070023					53-0160	2000 Series Exhaust Ring, (Mo seg)


	Copyrights Signet Products, Corp. 2017

Last update January 27, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com