Spare Parts List - Signet Products Inc.


	"Quality and Value through Engineering"

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Parts by OEM
- Plasma Etch
  - Lam Research
- Implanter
  - VSEA-AMAT
  - Axcelis
    - 6200
    - 6200A
    - 6200 All
    - 8200
    - 8250
    - GSD LED ELS
    - NV10
    - NV20
    - ULTRA
    - Ion Gauge Tube
  - Applied Mat'l.
  - Nissin
    - Med Current
  - ULVAC
    - IW630 Med Pwr
- PVD
  - Novellus
    - 3180
    - 3190
    - 3280
    - 3290
    - Ion Gauge Tube
- MBE
  - Veeco
    - GEN 2000
    - GEN III
  - Riber
    - R49
    - R6000
  - Riber/VG
    - V90
    - V100
    - V150
  - MBE Sales
- MOCVD
  - Aixtron
  - Veeco/Emcore
    - D125
    - D180
    - E300
    - E400
    - E450
    - K465
    - K475
  - MOCVD Sales
- Vacuum Prod.
  - Agilent Varian
    - Ion Gauge Tube
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    - D125
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  - Waveguide Liner VSEA Implanters
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Data Sheets
- Plasma Etch
  - Lam Research
    - All Lam Research
    - 9500
- Implanters
  - VSEA
    - All VSEA
    - A2F
    - 350D/DE CF/DF3000
    - E220 E500 E1000
    - 120/160/180 XP
    - ViiSion®
    - Genus
    - Vista®
  - Axcelis
  - Applied Mat'l.
    - All Applied
    - 9000
    - XR
- MBE
  - All MBE
  - Veeco/Emcore
  - Riber
  - Riber VG
- MOCVD
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- PDS Introduction
Signet Home

160

The following Parts are available from Signet Products for the

VIISta VSEA / Applied Materials Tool

Click on the part picture to go to another page with a larger image and more information about the part..

XXX

This page is in OEM Part Nbr Sequence, use the up arrows before the Signet/OEM Part Nbrs to re-sort the list.

	Oem Part Nbr	Part Description	Part Image		Signet Part Nbr	DWG	KIT	PDS
	E17077190	Shield, Gauss			37-7190			PDS
	E17089751	Aperture, Defining /AC			37-9751			PDS
	E17092410	Fil. Post Insulator			37-9241
	E17094401	Tantalum Gas Tube			37-94401			PDS
	E17094401 Ref.	Tantalum Gas Tube			30-94401			PDS
	E17094421 Ref.	Base Plate .060 Liner, W			30-4421			PDS
	E17094550	Retainer, Magnet			37-4550			PDS
	E19010120 Ref.	Enhanced HV Source Bushing			30-1012			PDS

	Notes:
	A "DWG" Following the Signet Part Nbr indicates a link to a Drawing of the Part or Assembly.
	A "KIT" Following the Signet Part Nbr indicates it's a Kit and is a link to the Kit Parts List Page
	A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.
	A *"Ref."* following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.


	Copyrights Signet Products, Corp. 2017

Last update February 8, 2016


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com