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Parts List for Axcelis - Eaton/Nova NV20A Systems
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A small picture following the Signet part number is a link to the Part Picture page. |
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. |
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page |
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format. |
Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design. |
The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list. |
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OEM PN |
Picture |
DWG |
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Signet Part # |
Part Description |
KIT |
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PDS |
5000024 | | | | 37-6007 | Standoff, 1/2D X 5/8L, 8-32 | | | 5000132 | | | | 37-6042 | Standoff, 3/8D X 3/8 L,6-32 | | | 1708680 Ref. | | | | 40-0868 | Repeller Insulator Spacer | | | 17036670 Ref. | | | | 40-3667 | A/C Rear Plate, Gas only, NV20A | | | 17072941 Ref. | | | | 40-8984 | Repeller Stud 10-32 x 1 3/32 | | | 1200321 Ref. | | | | 40-8993 | Filament Mounting Screw | | | 1790420 Ref. | | | | 40-9042-2 | Repeller Cup Shield, Ta | | | 4300031 | | | | 44-0031 | Retaining Rod Clip | | | 4000059 | | | | 44-0059 | Retaining Rod Spring | | | 1100440 | | | | 44-0440 | 20KV Feedthrough | | | 1704990 | | | | 44-0499 | Arc Chamber Side Plate | | | 1706380 | | | | 44-0638 | Nozzle Retainer, 5ppm | | | 1708680 | | | | 44-0868 | Insulating Bushing, A/C | | | 1709460 | | | | 44-0946 | Spacer, S/S | | PDS | 17032830 | | | | 44-3283 | Insulating Bushing | | | 17033150 | | | | 44-3315 | Bushing, Socket Joint - Source | | PDS | 17033160 | | | | 44-3316 | Ball Joint | | PDS | 17033170 | | | | 44-3317 | Filament Strap | | | 17036440 | | | | 44-3644 | Retaining Rod, Tantalum | | | 17036670 | | | | 44-3667 | Gas Plenum-A/C Rear Plate | | | 17043870 | | | | 44-4387 | Filament Clamp | | | 17048870 | | | | 44-4887 | Arc Chamber Front Plate | | | 1769100 | | | | 44-6910 | Bias Plate | | PDS | 1789810 | | | | 44-8981 | Arc Chamber End Plate | | | 1789820 | | | | 44-8982 | Filament Shield | | | 1789830 | | | | 44-8983 | Repeller Plate | | | 1789840 | | | | 44-8984 | Repeller Mounting Screw | | PDS | 1789850 | | | | 44-8985 | Filament | | | 1789870 | | | | 44-8987 | Arc Chamber Mount | | | 1200321 | | | | 44-8993 | Filament Mounting Screw | | | 1790420 | | | | 44-9042 | Repeller Shield | | | 17097340 | | | | 44-9734 | Feed Strap, Filament | | |
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