 |
OEM PN |
PIC |
|
Signet Part # |
Part Description |
| | PIC | 52-0100 | 2600G3 Exhaust Collector Ring, Enhanced |
| | | 52-0100-1 | Mo Insert (for use with 52-0100) |
| | | 52-0102 | 2600G3 O-Ring |
| | | 52-0120 | 2600G3 Exh Coll Ring w Opt Mon Enhanced |
| | | 52-0120-1 | Mo Insert (for use with part # 52-0120) |
| | | 52-0140 | GaAs Wafer(100mm) |
| | | 52-0150 | InP Wafer (100mm) |
| 40070140 | | 53-0103 | 2600G3 Exhaust Ring with Optical Monitor |
| 41020236 | | 53-0108 | Ceran Upper Ring Segment |
| | | 53-0110 | 2600G3 Quartz Ceiling Plate |
| | | 53-0111 | 2600G3 Quartz Thrust Piece |
| 40070246 | | 53-0150 | 2600G3 Exhaust Collector Ring (All Moly) |
| 40070203 | | 53-0190 | 2600G3 Exhaust Collector Ring |
| 40060030 | | 53-0300 | Glovebox Gauntlets - 300MM |
| | | 53-0470 | Particle Trap Housing |
| 40020900 | | 53-0510 | 2600G3 Nozzle (Quartz) |
| 40020918 | | 53-0520 | 2600G3 Ceiling Plate (Quartz) |
| 40020911 | | 53-0530 | 2600G3 Diffusion Barrier (Quartz) |
| 40020920 | | 53-0540 | 2600G3 Supporting Disk (Quartz) |
| 40020919 | | 53-0550 | 2600G3 Supporting Tube (Quartz) |
| 40021039 | | 53-0560 | 2600G3 Pull Down Pad (Quartz) |
| 40020457 | | 53-0570 | 2600G3 Segment (Quartz) |
| 40021059 | | 53-0580 | 2600G3 Sleeve (Quartz) |
| 40020807 | | 53-0590 | 2600G3 Nozzle Holder (Quartz) |
| 40020600 | PIC | 53-0600 | 2600G3 Ceran Lower Ring Segment #1 |
| 40020601 | PIC | 53-0601 | 2600G3 Ceran Lower Ring Segment #2 w/h |
| 40020602 | PIC | 53-0602 | 2600G3 Ceran Lower Ring Segment #3 |
| 40020603 | PIC | 53-0603 | 2600G3 Ceran Lower Ring Segment #4 w/h |
| 40021081 | | 53-0630 | 2600G3 Supporting Disk (Quartz) |
| 40020965 | | 53-0640 | 2600G3 Segment (Quartz) |
| 40020964 | | 53-0650 | 2600G3 Segment (Quartz) |
| 40020963 | | 53-0660 | 2600G3 Segment (Quartz) |
| 40020962 | | 53-0670 | Segment (Quartz) |
| 40020913 | | 53-0680 | 2600G3 Supporting Segment (Quartz) |
| 40020912 | | 53-0690 | 2600G3 Supporting Segment (Quartz) |
| 40020908 | | 53-0700 | 2600G3 Tension Disk (Quartz) |
| 40021050 | | 53-0710 | 2600G3 Ceiling Plate (Quartz) |
| 40020690 | | 53-0720 | 2600G3 Ceiling Plate (Quartz) |
| 40020643 | | 53-0730 | 2600G3 Nozzle Holder (Quartz) |
| 40020642 | | 53-0740 | 2600G3 Nozzle Holder (Quartz) |
| 40020512 | | 53-0750 | 2600G3 Nozzle injector (Quartz) |
| 40020586 | | 53-0760 | 2600G3 Supporting Tube (Quartz) |
| 40020766 | | 53-0770 | 2600G3 Base Plate Holder (Quartz) |
| 40020691 | | 53-0780 | 2600G3 Segment (Quartz) |
| 40020693 | | 53-0790 | 2600G3 Banana (Quartz) |
| 40020692 | | 53-0810 | 2600G3 Sleeve (Quartz) |
| 40020436 | | 53-0820 | 2600G3 Diffusion barrier (Quartz) |
| 40020713 | | 53-0830 | 2600G3 Ceiling Plate (Quartz) |
| 40020445 | | 53-0840 | 2600G3 Sleeve (Quartz) |
| 40020694 | | 53-0850 | 2600G3 Ceiling Plate (Quartz) |
| 40020378 | | 53-0860 | 2600G3 Ceiling Plate (Quartz) w/SN |
| 40020798 | | 53-0870 | 2600G3 Ceiling Plate (Quartz) 11mm slot |
| 40020686 | | 53-0880 | 2600G3 Rot-monitoring (Quartz) |
| 40020236 | | 9006 | 2600G3 Ceran Lower Ring Kit |
| | | 9007 | Ceran Upper Ring Kit |
