We have these parts for the 2800 MOCVD Tool
OEM PN Part Description Part Image Signet PN
2800G4-R Moly Pin, 11 mm53-0004
400016374Clamping Plate, Shutter Mounting, Moly52-4050
40017509Shield, Robot G4 (Moly)53-3061
40021103Supporting Disc Pin for 2800G4 opaque52-1103
40021131Quartz Ring, opaque52-1742
40021672Diffusion Barrier, QRTZ MPM 12453-9862
400217912800 Ehaust Connector, quartz53-1791
40021945AX2800 Support Tube, Quartz53-9861
40021949Quartz Tube, opaque 53-1949
40150874 Retaining Plate, 280053-0874
40150883164mm End Effector , AL53-4676
41020371AX2800 Support Disc, Quartz53-9863

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.
 
 
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com