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We have these parts for the Novellus 3290 PVD Tool

OEM PN	Part Description	Part Image	Signet PN
00-678214-00	Shield Press Plate Cavity Alum		33-8214
00-678215-00	Shield Press Plate Cavity Alum		33-8215
00-678216-00	Shield Press Plate Cavity Alum		33-8216
00-678506-01	Shield Outer		33-8506-01
00-678507-01	Shield Inner		33-8507-01
00-680239-01	Shield Ground		33-0239-01
04-712094-00	Source Assy P/P L/L Ram		33-712094
04-712159-00	Source Assy L/L ram		33-712159
04-712188-00	Source Assy L/L ram Center		33-712188
04-714075-01	Insert, Clip Ring		33-4075
04-715839-01	Shield Front Plate Heater Bore		33-5839-01
04-715865-02	Shield, Cavity, 6"		33-5865
04-715893-01	Shield, Cavity PP 4"		33-9301
04-718928-02	Shield Press Plate Cavity 6"		33-8928-02

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

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	Signet Products, Inc. 2 Davis Drive Belmont, CA 94002 phone: (650) 592-3575 fax: (650) 592-7223 e-mail sales@signetproducts.com