We have these parts for the Novellus
3180
PVD
Tool
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OEM PN |
Part Description |
Part Image |
Signet PN |
| 00-664205-00 | Shield, Primary 4" | | 33-664205 | | 00-664219-00 | Shield, Pressure plate cavity, 4" | | 33-664219 | | 00-664337-00 | Shield Press PLT Cavity | | 33-4337 | | 00-673816-00 | Shield, ConMag Combo | | 33-3816 | | 00-674780-00 | Shield Press PLT | | 33-4780 | | 00-674841-00 | Shield Table | | 33-4841 | | 00-674846-00 | Secondary Shield | | 33-4846 | | 00-674847-00 | Primary Shield | | 33-4847 | | 00-677852-01 | Ring Etch | | 33-677852-01 | | 00-678211-00 | Press Plate Cavity Alum | | 33-8211 | | 00-678212-00 | Press Plate Cavity Alum | | 33-8212 | | 00-684266-00 | Shield Insulator | | 33-4266 | | 00-684267-00 | Ring Etch | | 33-684267 | | 00-684289-00 | Ring Etch | | 33-4289 | | 00-684290-00 | Shield Insulator | | 33-4290 | | 00-685949-00 | Shield Secondary Table | | 33-5949 | | 00-685950-00 | Shield Primary Table | | 33-5950 | | 04-712264-01 | Front Plate Heater Bore Shield | | 33-2264-01 | | 04-715835-02 | Shield Front Plate Heater Bore | | 33-5839-02 |
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