Parts List for Aixtron 2400 Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
52-0130Exhaust Collector Ring, Enhanced
52-0130-1Mo Insert
4007012953-01012400G3 Exhaust Collector Ring
4007020253-01022400G3 Exhaust Collector Ring (Mo)
53-01202400G3 Quartz Ceiling Plate
4107005753-01702400G3 Exhaust Collector Ring (Mo seg)
4006003053-0300Glovebox Gauntlets - 300MM
4107001853-04902400 DN25KF Exh Coll Ring (Mo Segmented)
4002085753-08902400G3 HT Ceiling Plate (Quartz)
4002080753-09002400G3 HT Nozzle Holder (Quartz)
4002090153-09102400G3 HT Nozzle (Quartz)
4002068553-09202400G3 HT Supporting Disk (Quartz)
4002035453-09302400G3 HT Base Plate Holder (Quartz)
4002090853-09402400G3 HT Pull Down Pad (Quartz)
4002072253-09502400G3 HT Sleeve (Quartz)
4002084553-09602400G3 HT Supporting Disk (Quartz)
4002045653-09702400G3 HT Segment (Quartz)
4002044253-09902400G3 HT Plate, Banana (Quartz)
4002064653-10002400G3 HT Quartz Ring (Quartz)
4002064753-10102400G3 HT Quartz Rinf (Quartz)
4002018353-10302400G3 Nozzle Holder (Quartz)
4002018453-10402400G3 Nozzle (Quartz)
4002061253-10502400G3 Supporting Plate (Quartz)
4002045653-10602400 Ceran Upper Ring Segment
4002042353-10702400G3 Base Plate Holder (Quartz)
4002061353-10802400G3 Pull Down Pad (Quartz)
4002039553-10902400G3 Sleeve (Quartz)
4002066453-11002400G3 Nozzle Injector (Quartz)
4002076353-11102400G3 Tension Disk (Quartz)
4002076453-11202400G3 Supporting Disk (Quartz)
4002025953-11302400 Nozzle (Quartz)
4002034853-11402400 Exhaust Tube (Quartz)
4002015853-11502400 T/C Sheath (Quartz)
4002035153-11602400 Ceiling Plate (Quartz)
4002012953-11702400 Vacuum Wand (Quartz)
9008Ceran Upper Ring Kit
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com