Parts List for Axcelis - Eaton 8200P and 8250 Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
440074601-103710-32 X 3/8 SHC Center Vented
350002702-0214O-Ring, Buna
350002802-0364O-Ring, Buna
6973-0006-811203-1015010-32 X 1 1/2 SHC
440000103-103710-32 X 3/8 SHC
440000703-1W00#10 Washer, Flat
440004103-1WS0#10 Washer, Split
6973-0002-620203-60256-32 X 1/4 SHC
440006103-60626-32 X 5/8 SHC
5053-0031-000103-6N00SHex Nut 6-32, Ag Plated
440023203-6W00Washer #6, Flat
440003403-6WS0Washer #6, Split
440004203-87508-32 X 1/2 BH
440012203-8W00#8 Washer, Flat
7230-0003-001437-6002Standoff, 3/8D X 3/4L, 6-32
5000024PIC37-6007Standoff, 1/2D X 5/8L, 8-32
5000132PIC37-6042Standoff, 3/8D X 3/8 L,6-32
7230-0003-002037-6045Standoff, 1/2D X 3/4 L, 6-32
7230-0003-000737-6046Standoff, 1/2 D X 1 L, 6-32
1708680 Ref.40-0868Repeller Insulator Spacer
17133400 Ref.PIC40-3340A/C for a Box liner
17133400 Ref.40-33401-42Moly Box Liner, ELS Dual Vaporizer
17133400 Ref.PIC40-3340-42Moly Box Liner, ELS Gas Only
17033150 Ref.40-3341Gas Inlet Nipple, Graphite
17036670 Ref.40-3667A/C Rear Plate, Gas only, NV20A
17156990 Ref.40-5699Cathode Wire Assembly
N\A40-6000AMain Body, Rev. A
17278160 Ref.40-7816A/C, Moly, Gas only, ELS, 8250
1790420 Ref.40-9042-2Repeller Cup Shield, Ta
430003144-0031Retaining Rod Clip
8462-0051-000144-0051Washer
400005944-0059Retaining Rod Spring
1704990PIC44-0499Arc Chamber Side Plate
1706380PIC44-0638Nozzle Retainer, 5ppm
1710763044-0763Flag Faraday
1708680PIC44-0868Insulating Bushing, A/C
6950-0017-000244-1702Screw, Retaining A/C
1712174044-1740Repeller
17121760A44-1760Set Screw, Moly
1711962044-1962Repeller, W
17282100144-2100Screw, Retaining A/C
1712175044-2175Inner Cup Shield
1712177044-2177Repeller Screw, Moly
1712185044-2185Repeller Insulator
1712193044-2193Cathode Nut - Moly, ELS
1719221144-2211Filament Support, ELS/VAE
17142890B44-2890Slotted Cathode
1713161044-3161Defining Beam Aperture
1713327044-3270Cathode Insulator, ELS/VAE
1703283044-3283Insulating Bushing
1703315044-3315Bushing, Socket Joint - Source
1703316044-3316Ball Joint
17033170PIC44-3317Filament Strap
1713330044-3330Filament Feed Strap
1733531044-3531Filament Clamp Eterna ELS
17036440PIC44-3644Retaining Rod, Tantalum
1703667044-3667Gas Plenum-A/C Rear Plate
1704387044-4387Filament Clamp
1724679044-4679Cathode Sub Assembly, ELS 2X
17048870PIC44-4887Arc Chamber Front Plate
1724680044-6800Filament for the ELS source
1717006044-7006Electrode Spacer
7631-0001-000244-7631Ion Gauge Tube, 3/4" Kovar TT
1727726044-7726Top Plate
1727814044-7814Insulator, Repeller
1727816044-7816A/C, Moly, ELS, 8250
1728785044-7850Filament, ELS .040
1728786044-8786Graphite Cathode Support
1728787044-8787Cathode Insulator Block
1718912044-8912Filament ELS with Flats
1718914044-8914Nut Plate, Moly ELS-IAS
1718916044-8916Filament Support
1789810PIC44-8981Arc Chamber End Plate
1789820PIC44-8982Filament Shield
1789840PIC44-8984Repeller Mounting Screw
1789850PIC44-8985Filament
1789870PIC44-8987Arc Chamber Mount
120032144-8993Filament Mounting Screw
1790420PIC44-9042Repeller Shield
1719221044-9221Filament Support - ELS/VAE
17097340PIC44-9734Feed Strap, Filament
 
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Signet Products, Inc.
2 Davis Drive
Belmont, CA 94002
phone: (650) 592-3575
fax: (650) 592-7223
e-mail sales@signetproducts.com