Implanter BOM Template (VARE) - Signet Products Inc.

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Parts List for VSEA E220, E500 & E1000 Systems

	OEM PN	PIC		Signet Part #	Part Description
E47000309			01-6718		6-32 X 3/16 BH Center Vented
E35000402			02-2263		O-Ring, Silicon
E35000234			02-2274		O-Ring, Silicon
N/A			1042		One Piece Bernas Arc Chamber Kit
N/A			1107		Fil. Replacement Kit, E220/500
E17014840 Ref.			30-1484		Copper Filament Feedthrough
E17014900 Ref.			30-1490		Filament Clamp Insulator
E17063160 Ref.			30-3160		End Plate, Top, Moly
E17063170 Ref.			30-3170		End Plate, Bottom, Moly
E17036910 Ref.			30-36910-1		Silver Fil. Spring, Right
E17036911 Ref.			30-36911-1		Silver Fil. Spring, Left
E17014691 Ref.			30-4691		Top Plate, Moly
2866042 Ref.			30-6042		Standoff, C/B 3/8D X 3/8L, 6-32
E17060430 Ref.			30-6043		Upper Filament Post Assembly
E17092400 Ref.			30-6043P		Filament Post Moly Pin
E170633140/50 Ref.			30-6315		A/C Support, Fil. or Rep. Side
E17063190 Ref.			30-6319		Bottom Plate, Dual Vapor, Moly
E170636921 Ref.			30-6921		Side Plate, Moly
E17036930 Ref.			30-6930		Filament Clamp, Enhanced
E17036980 Ref.			30-6981		Reflector, Screw, Moly
E17037062 Ref.			30-7062		Shield End Plate, Top, Moly
E17037063 Ref.			30-7063		Shield End Plate, Bottom, Moly
E17037064 Ref.			30-7064		Shield End Plate, Top, Moly
E17037065 Ref.			30-7065		Shield End Plate, Bottom, Moly
E17186271 Ref.			30-8271		Insulator, Inner, BN
E17168280 Ref.			30-8280		Insulator Nut, BN
E17014832 Ref.			31-14832		Gas Feed Tube, Enhanced
E17014833 Ref.			31-14833		Gas Feed Tube, Enhanced
E40000106			37-0106		Shoulder Screw
E19009080			37-0908		Filament, Bernas, E220/500
N/A			37-10932		Hex Balldriver Kit, Model BLX 8
E17011320			37-1132		Source Insulator, BN
E17121430			37-1430		Right Filament Spring
E17121431			37-1431		Left Filament Spring
E17014660			37-1466		Rod, Retaining, s/s
E17014670			37-1467		Arc Chamber End Plate
E17014690			37-1469		Arc Chamber Top Plate, Mo
E17014710			37-1471		Arc Chamber Side Plate
E17014720			37-1472		Arc Chamber End Plate Shield
E17014750			37-1475		Filament Screw
E17014761			37-1476		Bottom Plate, Gas Only, Moly
E17014780			37-1478		Filament Clamp
E17014790			37-1479		Filament Spring Clamp
E17014810			37-1481		Filament Spring
E17014832			37-14832		Gas Feed Tube, Ta
E17014833			37-14833		Gas Feed Tube, Ta
E17121610			37-1610		Insulator, BN
E17121620			37-1620		Insulator, Nut HBR
E17026530			37-2653		Mounting Plate
E17026540			37-2654		Suppression, Electrode, Graphite
E17026590			37-2659		Defining Aperture
E17032830			37-2830		Set-Up Cup #1
E17032831			37-2831		Set-Up Cup #1 w/AC
E17023041			37-3041		Aperture, Source Housing
E17023042			37-3042		Aperture, Source Housing /AC
E17103110			37-3110		PLT, Scan, Front, Ground
E17063160			37-3160		End Plate, Filament, W
E17063170			37-3170		End Plate, Repeller, W
E17063191			37-3191		Bottom Plate, W
E17033420			37-3342		Exit Analyzer Liner
E17123350			37-3350		Inner Analyzer Liner
E17123360			37-3360		Inner Analyzer Liner L-Shaped
E17036990			37-3699		Filament, Bernas, E220/500
E17037010			37-3701		Insulator, Filament Clamp, BN
113952001			37-3952		Filament V 2.5
E17014691			37-4691		Top Plate, W
E59000021			37-6004		Standoff, 3/8D X 1 1/4L, 6-32
E59000011			37-6006		Standoff, 3/8D X 2L, 6-32
2866009			37-6009		Standoff, 1/2D X 1L, 8-32
E59000003		PIC	37-6042		Standoff, 3/8D X 3/8 L,6-32
E59000002			37-6043		Standoff, 3/8D X 1/2 L, 6-32 3/16Dp.
E59000002			37-6044		Standoff, 1/2D X 1/2 L, 6-32 9/64Dp.
E17066280			37-6280		Plate, Side, Arc -W
E17066290			37-6290		Plate, End, Top, Arc - W
E17066291			37-6291		Plate, End, Bottom, Arc - W
E17066300			37-6300		Shield, Top, End Plate - W
E17066301			37-6301		Shield, End - W
E17066308			37-6308		Shield, End - 2 Hole - W
E1706390			37-6319		Bottom Plate, Dual Vap., Tungsten
E17036400			37-6400		Liner, Support Graphite
E17036410			37-6410		Dipole, Liner Graphite
E17026610			37-6610		Set-Up Cup #2
E17026611			37-6611		Set-Up Cup #2 w/AC
E17026690			37-6690		Rear Ground Plate
E17026720			37-6720		Graphscan, scan plate
E17106820			37-6820		Beam Stop, Neutral Dump
E17036920			37-6920		Source Side Plate
E17036921			37-6921		Side Plate, W
E17036950			37-6950		Clamp, Filament Spring
E17036981			37-6981		Reflector, Screw, Ta
E17037062			37-7062		Shield, End Plate, Top, W
E17037063			37-7063		Shield, End Plate, Bottom, W
E17037064			37-7064		Inner Plate, Filament, W
E17037065			37-7065		Inner Plate, Repeller, W
E17168271			37-8271		Insulator, Filament, Inner, HP/HBC
E17168272			37-8272		Insulator, Inner, BN
E17168280			37-8280		Insulator, Nut, Al2O3
E17179690			37-9690		Screw, Filament no head
E17079880			37-9880		Aperture, Dual
E17079910			37-9910		Shield, 2 Step
E1712160 Ref.			40-3430		Retainer, Alumina
E17037001 Ref.			44-0032		Filament Mounting Screw
E17014740			44-0776		Filament .090" dia x 5" Long
E17011320 Ref.			44-3410		Insulator Short
E17168272 Ref.			44-3420		Insulator, Long
E17037001			73-0032		Filament Mounting Screw, Ta

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	Signet Products, Inc. 2 Davis Drive Belmont, CA 94002 phone: (650) 592-3575 fax: (650) 592-7223 e-mail sales@signetproducts.com