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More Info

We have these parts for the Novellus 3190 PVD Tool

OEM PN	Part Description	Part Image	Signet PN
00-677852-01	Ring Etch		33-677852-01
00-678211-00	Press Plate Cavity Alum		33-8211
00-678212-00	Press Plate Cavity Alum		33-8212
00-685949-00	Shield Secondary Table		33-5949
00-685950-00	Shield Primary Table		33-5950
04-712264-01	Front Plate Heater Bore Shield		33-2264-01
04-715835-02	Shield Front Plate Heater Bore		33-5839-02

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

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	Signet Products, Corp. 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 phone: (650) 592-3575 e-mail rdavies@signetproducts.com