Parts List for Axcelis - Eaton/Nova NV20A Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
110044044-044020KV Feedthrough
120032144-8993Filament Mounting Screw
1200321 Ref.40-8993Filament Mounting Screw
1703283044-3283Insulating Bushing
1703315044-3315Bushing, Socket Joint - Source
1703316044-3316Ball Joint
17033170PIC44-3317Filament Strap
17036440PIC44-3644Retaining Rod, Tantalum
1703667044-3667Gas Plenum-A/C Rear Plate
17036670 Ref.40-3667A/C Rear Plate, Gas only, NV20A
1704387044-4387Filament Clamp
17048870PIC44-4887Arc Chamber Front Plate
1704990PIC44-0499Arc Chamber Side Plate
1706380PIC44-0638Nozzle Retainer, 5ppm
17072941 Ref.40-8984Repeller Stud 10-32 x 1 3/32
1708680PIC44-0868Insulating Bushing, A/C
1708680 Ref.40-0868Repeller Insulator Spacer
170946044-0946Spacer, S/S
17097340PIC44-9734Feed Strap, Filament
176910044-6910Bias Plate
1789810PIC44-8981Arc Chamber End Plate
1789820PIC44-8982Filament Shield
1789830PIC44-8983Repeller Plate
1789840PIC44-8984Repeller Mounting Screw
1789850PIC44-8985Filament
1789870PIC44-8987Arc Chamber Mount
1790420PIC44-9042Repeller Shield
1790420 Ref.40-9042-2Repeller Cup Shield, Ta
400005944-0059Retaining Rod Spring
430003144-0031Retaining Rod Clip
5000024PIC37-6007Standoff, 1/2D X 5/8L, 8-32
5000132PIC37-6042Standoff, 3/8D X 3/8 L,6-32
 
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Signet Products, Corp.
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
phone: (650) 592-3575
e-mail rdavies@signetproducts.com