Parts List for all Axcelis / Eaton GSD Equipment Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
1703315044-3315Bushing, Socket Joint - Source
1703316044-3316Ball Joint
17036440PIC44-3644Retaining Rod, Tantalum
1704387044-4387Filament Clamp
1706199144-1991Aperture Quad Exit w/AC
1706687144-6871Plate Strike Injector Faraday w/AC
1708680PIC44-0868Insulating Bushing, A/C
1708971144-8971Electrode .5 VG
1709724044-7240Insulator
1709732044-9732Spacer
17097340PIC44-9734Feed Strap, Filament
1709851144-9851Source Housing Exit Aperture /AC
1709920144-9201Plate Strike, Resolver
1709963144-9631Inner Beam Dump w/AC
1709966144-9661Outer Beam Dump /AC
1709967144-9671Outer End w/AC
1709983144-9831Shield Faraday Cup w/AC
1710046144-0461Cup Shield w/AC
1710052144-0521Exit Dump w/AC
1710123044-0123Filament Shield
1711178044-1780Outer Dump w/AC
1711180044-1180Outer Duct w/AC
1711181044-1181Inner Duct w/AC
1711186044-1186Flange Tube w/AC
1711319044-1319Aperture 70 degree Magnet w/AC
1711541044-1541Aperture Faraday Support, Linac w/AC
1711593044-5930Plate Aperture, Linac VG
1712174044-1740Repeller
1712175044-2175Inner Cup Shield
17121760A44-1760Set Screw, Moly
1712177044-2177Repeller Screw, Moly
1712185044-2185Repeller Insulator
1712190044-2190Cathode Support Insulator
1712193044-2193Cathode Nut - Moly, ELS
1712341044-3410Insulator Short
1712342044-3420Insulator, Long
17123430 Ref.40-3430Retainer, Alumina
1712441044-2441Spacer Retaining Rod
1712556144-5561Extraction Electrode, Manipulator
1712557144-5571Ground Electrode, Manipulator
1712759044-2759Arc Chamber, Moly
1712760044-2760Repeller, Moly
1712761044-2761Shield, Insulator
1712765044-2765Filament Shield
17128110PIC44-2811Arc Slit, 15R Moly
1712823044-8230Spacer, Shoulder Screw
1712930 Ref.40-2193Cathode Shield, Graphite
1712970044-2970Strike Plate #1
1712971044-2971Strike Plate #2
1712972044-2972Strike Plate #3
1712973044-2973Strike Plate #4
1713161044-3161Defining Beam Aperture
17132290PIC44-3229Ground Electrode Insert
1713327044-3270Cathode Insulator, ELS/VAE
1713330044-3330Filament Feed Strap
1713331044-3331Arc Chamber W ELS/VAE
1713334044-3334Cathode Repeller
1713340044-3340Arc Chamber Moly ELS/VAE
17133400 Ref.PIC40-3340A/C for a Box liner
1713544044-3544Electron Shower Liner /AC
17142890B44-2890Slotted Cathode
17156990 Ref.40-5699Cathode Wire Assembly
1715800044-5800Cathode,Two piece Moly/Tungsten
17161640PIC44-1640Beam Line Bellows, GSD
1717002044-7002Extraction Electrode /AC
1717003044-0030Ground Electrode /AC
17170040PIC44-7004Extraction Electrode Insert
1717006044-7006Electrode Spacer
1717007044-7007Electrode Shield
1717060044-0600Repeller, W
1717061044-0610Repeller Stud, W
17174410 Ref.PIC40-7441Insulator, GSD ELS - Alumina
1718912044-8912Filament ELS with Flats
1718915044-8915Cathode Plate, Source
1723010044-3010Arc Slit, T15 Mo
1725485044-5485Filament, ELS
1728785044-7850Filament, ELS .040
1728786044-8786Graphite Cathode Support
1728787044-8787Cathode Insulator Block
1728788044-8788Filament Clamp, ELS
17287880 Ref.40-8788Enhanced ELS Fil. Clamp w/Ta screw
176653144-6531Plate Burn - Thru
1789800 Ref.40-8980-1Filament Clamp, Enhanced
1789850PIC44-8985Filament
400116644-1166Spring, Compression
400116744-1167Spring, Compression
430003144-0031Retaining Rod Clip
5001608 & 7230-0003-001437-6002Standoff, 3/8D X 3/4L, 6-32
N/APIC4028Filament Replacement Kit
N/APIC40-3340-42Moly Box Liner, ELS Gas Only
 
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Signet Products, Corp.
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
phone: (650) 592-3575
e-mail rdavies@signetproducts.com