Implanter BOM Template (VARE) - Signet Products Inc.

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Parts List for Aixtron Miscellaneous Systems

	OEM PN	PIC		Signet Part #	Part Description
		PIC	53-0160		2000 Series Exhaust Ring, (Mo seg)
			53-0106		Spring for Poppet, 25 MBAR
			53-0105		Spring for Poppet, 70 MBAR
			53-0104		Poppet Assy
40060030			53-0300		Glovebox Gauntlets - 300MM

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