We have these parts for the Emcore D180 MOCVD Tool
OEM PN Part Description Part Image Signet PN
Heating Element Set .015" Rhenium50-0145
Heater Separator D180, AL9950-3326AL
D180 Elect Buss Bar, KIT5133
Top Heat Shield, (more holes) W50-3323
Ceramic Spacer, D180, AL9950-6E01AL
Heater Support, D180, AL9950-3327AL
Heating Filament Inner, Rhenium50-0147
D180 Ceramic Spacer, Large, AL9950-9E01AL
Connecting Rod 3.4IN, Heater, D-18051-4434
D180 Heater Rebuild Kit, Low Temp5110
Shield, D-180, 0.030"Moly51-6950
Spindle D180 Moly51-0104
1003323D180 Heater Inner, AC Graphite coated50-0400
1011431D180, Spindle,TZM OR MOLY50-0103
1003320Arbor Screw, TZM, 4-40 X .3 Flat Hd50-0430
1003322D180 Graphite Outer Heater, AC coated 50-0401
1003324Heat Shield, Top D-180, Signet Moly51-3324
1003325Heat Shield Base, Mo51-3325
1003326Heater Separator D180, HBN50-3326
1003327Heater Support, D180, HBN50-3327
1003328Nut Cup GaN Heater, BN50-3328
1003329D180 Buss Bar , Outer 2pc51-3329
1003330D180 Elect Buss Bar, inner 2 pc51-3330
1004473Spacer Nut 4-40 2 flats .270th, Moly 50-4473
10048272-56 Moly Nut .07th.2 Flats50-4827
10048284-40 Moly Spacer, Nut .20th 50-4828
1005628Susceptor aerated, TZM50-5628
1007541Heater Support GaN, BN50-7541
1007542Base Heat Shield, W50-3325
1007560Top Heat Shield, (less holes), W50-3324
1019383Heating Filament Outer, Rhenium50-0146
1084220-100210-32 X 5/16 SHCV AG Plated01-1031S
5023E01Moly Nut, D18050-3E01
5335E01Moly Standoff 50-5E01
5346E01Ceramic Spacer, D180,HBN50-6E01
5348E01D180, Nut, 4-40 .09th, Oval, Moly50-8E01
5349E01 D180 Ceramic Spacer, Large, HBN50-9E01
5350E01Ceramic Bushing 1/4" D- Standoff, HBN50-0E01
5388E01Suseptor, Moly, D18050-88E01
8032E01Thermocouple, Type R, 8"50-2E01

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can replace the OEM part and that it is not the original design but rather it is an improved design.

Copyrights Signet Products Corp. 2000 - 2017
Signet Products, Corp.
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
phone: (650) 592-3575
e-mail rdavies@signetproducts.com