Parts List for Axcelis NV10-80 & NV10-16 Systems
up arrow OEM PN PIC u arrow Signet Part # Part Description
110044044-044020KV Feedthrough
112758044-2758Arc Chamber, Complete Assembly
120008044-0080Retaining Rod
120032044-0032Filament Mounting Screw
120032144-8993Filament Mounting Screw
1200321 Ref.40-8993Filament Mounting Screw
170031044-7003Filament Clamp
1703283044-3283Insulating Bushing
17033170PIC44-3317Filament Strap
17036440PIC44-3644Retaining Rod, Tantalum
1703667044-3667Gas Plenum-A/C Rear Plate
17036670 Ref.40-3667A/C Rear Plate, Gas only, NV20A
1703768044-3768Extraction Electrode
1703772044-3772High Voltage Aperture
1704387044-4387Filament Clamp
17048870PIC44-4887Arc Chamber Front Plate
170494044-0494Curved Field Block
1704990PIC44-0499Arc Chamber Side Plate
1704990 Ref.74-0499Side Plate, W
170500044-0500Arc Chamber Rear Plate
170500140-0500A/C Rear Plate w/o Solid Source Inlet
170503044-0503Arc Chamber Mount
1706234044-2340Replacement High Energy Electrode
17062350 Ref.40-2350Extraction Electrode Plate Modified
170637044-0637Nozzle
1706380PIC44-0638Nozzle Retainer, 5ppm
170644044-0644Arc Chamber End Plate Shield
17072941 Ref.40-8984Repeller Stud 10-32 x 1 3/32
170776044-0776Filament .090" dia x 5" Long
170867044-0867Arc Chamber End Plate
1708680PIC44-0868Insulating Bushing, A/C
1708680 Ref.40-0868Repeller Insulator Spacer
170946044-0946Spacer, S/S
17100430 Ref.40-8983Repeller Assembly, Mo
1711961074-9610Filament Mounting Screw - W
171207044-1207Single Gas Electrode
1712341044-3410Insulator Short
1712342044-3420Insulator, Long
17123430 Ref.40-3430Retainer, Alumina
171304044-1304Source Shield Tab
171524044-1524Extension
171748044-1748Arc Chamber Front Plate
171795044-1795Beam Aperture
171860044-1860Source Cooling Tube
174009044-4009Beam Defining Plate
174012044-4012Liner Shield, Graphite
174029044-4029Gas feed tube
174029140-4029Gas Feed Tube, Enhanced
174455044-4455Beam Plate
176910044-6910Bias Plate
178980044-8980Filament Clamp
1789800 Ref.40-8980-1Filament Clamp, Enhanced
1789810PIC44-8981Arc Chamber End Plate
1789820PIC44-8982Filament Shield
1789830PIC44-8983Repeller Plate
1789840PIC44-8984Repeller Mounting Screw
1789850PIC44-8985Filament
1789870PIC44-8987Arc Chamber Mount
178988044-8988Electric Strap
178989044-8989Electric Strap
1790420PIC44-9042Repeller Shield
1790420 Ref.40-9042-2Repeller Cup Shield, Ta
179556044-9556A/C Top Plate
17S343244-3432Arc Chamber Front Slit
190040044-0040Electron Shower Filament
3300002PIC44-3302Ion Gauge Tube, 3/4" Glass
3300002 Ref.44-3302SIon Gauge Tube Vacuum Sealed
330000837-2518TC Vacuum Gauge Tube
330004444-0044TC Gauge Tube
350002602-0110O-Ring, Buna
350002702-0214O-Ring, Buna
350002802-0364O-Ring, Buna
350006702-0136O-Ring, Buna
350007602-0010O-Ring, Buna
400005944-0059Retaining Rod Spring
430003144-0031Retaining Rod Clip
440000103-103710-32 X 3/8 SHC
440000303-102510-32 X 1/4 SHC
440000703-1W00#10 Washer, Flat
440004103-1WS0#10 Washer, Split
440004203-87508-32 X 1/2 BH
440010303-66376-32 X 3/8 CPS
5000024PIC37-6007Standoff, 1/2D X 5/8L, 8-32
5000132PIC37-6042Standoff, 3/8D X 3/8 L,6-32
5000132 Ref.30-6042Standoff, C/B 3/8D X 3/8L, 6-32
N/A40-0001Replacement Low Energy Electrode
N/A40-0751Ion Gauge Tube Adaptor, 3/4" to 1"
Ref. 171748140-1748SArc Chamber Front Plate Shim
 
Copyrights Signet Products Corp. 2000 - 2017
  
 
Signet Products, Corp.
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
phone: (650) 592-3575
e-mail rdavies@signetproducts.com