Spare Parts List - Signet Products Inc.


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Parts List for Axcelis NV10-80 & NV10-16 Systems

A "PIC" Follwoing the Signet part number indicates a link to our Picture page.

A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly.

A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page

A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.

The initial list is in OEM part number Sequence, use the up arrows before the Signet
Part Number or OEM Part Number to re-sort the list.

	OEM PN	PIC	DWG		Signet Part #	Part Description	KIT		PDS
3500076					02-0010	O-Ring, Buna
3500026					02-0110	O-Ring, Buna
3500067					02-0136	O-Ring, Buna
3500027					02-0214	O-Ring, Buna
3500028					02-0364	O-Ring, Buna
4400003					03-1025	10-32 X 1/4 SHC
4400001					03-1037	10-32 X 3/8 SHC
4400007					03-1W00	#10 Washer, Flat
4400041					03-1WS0	#10 Washer, Split
4400103					03-6637	6-32 X 3/8 CPS
4400042					03-8750	8-32 X 1/2 BH
5000132 Ref.					30-6042	Standoff, C/B 3/8D X 3/8L, 6-32			PDS
3300008					37-2518	TC Vacuum Gauge Tube
5000024		PIC			37-6007	Standoff, 1/2D X 5/8L, 8-32
5000132		PIC			37-6042	Standoff, 3/8D X 3/8 L,6-32
N/A					40-0001	Replacement Low Energy Electrode			PDS
1705001					40-0500	A/C Rear Plate w/o Solid Source Inlet
N/A					40-0751	Ion Gauge Tube Adaptor, 3/4" to 1"			PDS
1708680 Ref.					40-0868	Repeller Insulator Spacer
Ref. 1717481					40-1748S	Arc Chamber Front Plate Shim
17062350 Ref.					40-2350	Extraction Electrode Plate Modified			PDS
17123430 Ref.					40-3430	Retainer, Alumina
17036670 Ref.					40-3667	A/C Rear Plate, Gas only, NV20A
1740291					40-4029	Gas Feed Tube, Enhanced
1789800 Ref.					40-8980-1	Filament Clamp, Enhanced			PDS
17100430 Ref.					40-8983	Repeller Assembly, Mo
17072941 Ref.					40-8984	Repeller Stud 10-32 x 1 3/32
1200321 Ref.					40-8993	Filament Mounting Screw
1790420 Ref.					40-9042-2	Repeller Cup Shield, Ta
4300031					44-0031	Retaining Rod Clip
1200320					44-0032	Filament Mounting Screw
1900400					44-0040	Electron Shower Filament
3300044					44-0044	TC Gauge Tube
4000059					44-0059	Retaining Rod Spring
1200080					44-0080	Retaining Rod
1100440					44-0440	20KV Feedthrough
1704940					44-0494	Curved Field Block			PDS
1704990		PIC			44-0499	Arc Chamber Side Plate
1705000					44-0500	Arc Chamber Rear Plate
1705030					44-0503	Arc Chamber Mount
1706370					44-0637	Nozzle
1706380		PIC			44-0638	Nozzle Retainer, 5ppm
1706440					44-0644	Arc Chamber End Plate Shield
1707760					44-0776	Filament .090" dia x 5" Long
1708670					44-0867	Arc Chamber End Plate
1708680		PIC			44-0868	Insulating Bushing, A/C
1709460					44-0946	Spacer, S/S			PDS
1712070					44-1207	Single Gas Electrode			PDS
1713040					44-1304	Source Shield Tab			PDS
1715240					44-1524	Extension
1717480					44-1748	Arc Chamber Front Plate
1717950					44-1795	Beam Aperture			PDS
1718600					44-1860	Source Cooling Tube
17062340					44-2340	Replacement High Energy Electrode			PDS
1127580					44-2758	Arc Chamber, Complete Assembly
17032830					44-3283	Insulating Bushing
3300002		PIC			44-3302	Ion Gauge Tube, 3/4" Glass			PDS
3300002 Ref.					44-3302S	Ion Gauge Tube Vacuum Sealed			PDS
17033170		PIC			44-3317	Filament Strap
17123410					44-3410	Insulator Short
17123420					44-3420	Insulator, Long			PDS
17S3432					44-3432	Arc Chamber Front Slit
17036440		PIC			44-3644	Retaining Rod, Tantalum
17036670					44-3667	Gas Plenum-A/C Rear Plate
17037680					44-3768	Extraction Electrode			PDS
17037720					44-3772	High Voltage Aperture			PDS
1740090					44-4009	Beam Defining Plate			PDS
1740120					44-4012	Liner Shield, Graphite			PDS
1740290					44-4029	Gas feed tube
17043870					44-4387	Filament Clamp
1744550					44-4455	Beam Plate			PDS
17048870		PIC			44-4887	Arc Chamber Front Plate
1769100					44-6910	Bias Plate			PDS
1700310					44-7003	Filament Clamp
1789800					44-8980	Filament Clamp
1789810		PIC			44-8981	Arc Chamber End Plate
1789820		PIC			44-8982	Filament Shield
1789830		PIC			44-8983	Repeller Plate
1789840		PIC			44-8984	Repeller Mounting Screw			PDS
1789850		PIC			44-8985	Filament
1789870		PIC			44-8987	Arc Chamber Mount
1789880					44-8988	Electric Strap
1789890					44-8989	Electric Strap
1200321					44-8993	Filament Mounting Screw
1790420		PIC			44-9042	Repeller Shield
1795560					44-9556	A/C Top Plate
1704990 Ref.					74-0499	Side Plate, W
17119610					74-9610	Filament Mounting Screw - W


	Copyrights Signet Products, Corp. 2017

Last update November19, 2014


	Signet Products, Corporation 521 Mount Hope Street, Suite 302 North Attleboro, MA 02760 Phone: (650) 592-3575 e-mail: rdavies@signetproducts.com