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Parts List for Axcelis - Eaton/Nova NV20A Systems
 
A "PIC" Following the Signet part number indicates a link to our Picture page. 
A "DWG" Following the PIC Column indicates a link to a Drawing of the Part or Assembly. 
A "KIT" Following the Part Description indicates it's a Kit and is a link to the Kit Parts List Page
A "PDS" at the far right is a link to a Signet Product Data Sheet in PDF format.

Notes: A "Ref." following an OEM part number indicates that the Signet Products part can
replace the OEM part and that it is not the original design but rather it is an improved design.
The initial list is in OEM part number Sequence, use the up arrows up arrow image before the Signet
Part Number or OEM Part Number to re-sort the list.
up arrow OEM PN PIC DWG u arrow Signet Part # Part Description KIT PDS
110044044-044020KV Feedthrough
120032144-8993Filament Mounting Screw
1200321 Ref.40-8993Filament Mounting Screw
1703283044-3283Insulating Bushing
1703315044-3315Bushing, Socket Joint - SourcePDS
1703316044-3316Ball JointPDS
17033170PIC44-3317Filament Strap
17036440PIC44-3644Retaining Rod, Tantalum
1703667044-3667Gas Plenum-A/C Rear Plate
17036670 Ref.40-3667A/C Rear Plate, Gas only, NV20A
1704387044-4387Filament Clamp
17048870PIC44-4887Arc Chamber Front Plate
1704990PIC44-0499Arc Chamber Side Plate
1706380PIC44-0638Nozzle Retainer, 5ppm
17072941 Ref.40-8984Repeller Stud 10-32 x 1 3/32
1708680PIC44-0868Insulating Bushing, A/C
1708680 Ref.40-0868Repeller Insulator Spacer
170946044-0946Spacer, S/SPDS
17097340PIC44-9734Feed Strap, Filament
176910044-6910Bias PlatePDS
1789810PIC44-8981Arc Chamber End Plate
1789820PIC44-8982Filament Shield
1789830PIC44-8983Repeller Plate
1789840PIC44-8984Repeller Mounting ScrewPDS
1789850PIC44-8985Filament
1789870PIC44-8987Arc Chamber Mount
1790420PIC44-9042Repeller Shield
1790420 Ref.40-9042-2Repeller Cup Shield, Ta
400005944-0059Retaining Rod Spring
430003144-0031Retaining Rod Clip
5000024PIC37-6007Standoff, 1/2D X 5/8L, 8-32
5000132PIC37-6042Standoff, 3/8D X 3/8 L,6-32
     
 
Copyrights Signet Products, Corp. 2017
  
 
 
Last update November 19, 2014
  
 
     
 
Signet Products, Corporation
521 Mount Hope Street, Suite 302
North Attleboro, MA 02760
Phone: (650) 592-3575
e-mail: rdavies@signetproducts.com